MultifunktionsLaser MF 100 UV

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April 2002

Innovative UV laser system for micro-processing
MF 100 UV uses short wavelengths to generate ultra-fine structures

Hanover, April 2002 − LPKF Laser & Electronics AG presents at Hannover Messe 2002 its new multifunction laser, the MF 100 UV − a precision tool specifically developed for processing ceramics, plastics and metals.

This innovation is LPKF's persuasive response to current demands in electronics and opto-electronics, sensor technologies and analysis. In all of these fields there is an increasing need for precise structuring in dimensions of less than 100 µm. Requirements include the production of openings, holes and cavities in a range of materials as well as two-dimensional structures in coatings and foils. In the past the creation of small dimensioned structures of this type using laser technologies has been either uneconomic or impossible, in particular in materials which are very transparent or reflective to Nd:YAG lasers.

The new multifunction laser MF 100 UV employs outstanding technological features to create the conditions required to satisfy these applications. The unit combines an intensively quality-switched UV laser source with a high-precision XY table system. With a working range of 100 mm x 100 mm, this combination allows up to 20 µm wide structures to be produced with approx. 1 µm reproducibility.

The MF 100 UV adopts the following technical principle: the wavelength of the triple-frequency solid state laser is absorbed much more intensively by many materials than infrared radiation. The material removal process is mainly cold. The processing leaves clean contours with very small thermally influenced zones.
Therefore, a special application is the production of high-precision holes in suitable ceramic boards.

In order to produce high circularity holes, the MF 100 UV incorporates a patented beam guidance system. A cross-table on air bearings provides for an exact tracking control and high dynamic levels during processing.
 

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