Thin Layer Structuring
Manufacturing of fine structures < 15 µm

Sensors structured on reel material
Thin metallic (Cu, Al, Pd, Pt...) or organic layers (conductive polymers, organic dielectrics...) with a thickness of up to 200 nm on flexible or rigid substrates are ablated with the help of the mask projection procedure and thus structured.
The layout is on a quartz mask and reduced on the substrate as illustrated. The laminar laser ablation guarantees the highest throughput.
Advantages of the LDP process
- no photolithography
- reduction of technology steps
- high throughput by reel to reel process
- no aggressive etching process
- no chemicals
- pollution free
- easily integrated into existing production lines
- yields > 90%
- recovery of the ablated material possible
- high resolution, precision and process speed